摘要
陶瓷材料作为一种在高温和腐蚀等苛刻环境中应用的重要材料,对其制备和加工技术进行研究是非常必要的。本文在简要概述传统微机电系统(MEMS)加工技术对制备陶瓷MEMS存在的不足基础上,着重介绍了由聚合物前驱体转化法制备陶瓷MEMS的制备方法、工艺流程、优缺点及未来发展方向。
It is necessary to explore the means of fabrication and processing technique of ceramics which are attractive and important materials for harsh--environment MEMS applications, such as high temperature and corrosive media. This paper reports emphatically a kind of new fabrication technique of ceramic MEMS--fabricating ceramic MEMS by pyrolysis conversion of pre--ceramic polymers based on a simple review of the limits of traditional fabrication techniques for MEMS. The processing scheme, advantages and disadvantages of this technique and the developing direction in the future are also discussed in great detail.
出处
《真空电子技术》
2007年第1期41-44,50,共5页
Vacuum Electronics
基金
国家自然科学基金资助项目(20574056)
西北工业大学研究生创业种子基金资助项目(Z200663)
