摘要
气体微流量标准是校准气体微流量的一种装置，可用于传递型和应用型参考漏孔及气体微流量计的校准。它由恒压式微流量计、流量校准系统、待校流量引入系统和测量与控制系统四部分组成。恒压式微流量计的变容室采用了活塞液压驱动波纹管结构，活塞的平动由恒力矩测速电机驱动导轨平动机构完成，活塞的位移用精密光栅尺测量。在流量测量过程中，测量与控制系统将变容室和参考室之间的压力差控制在工作压力值的0．01％之内。该标准装置可采用直接测量法和比较测量法对气体微流量进行校准，其量程为1．71～1．22×10－5PaL／S，不确定度＜2％。
A gas flow standard apparatus is introduced. It is a kind of calibration apparatus of gas throughput and can be used to calibrate gas flowmeter and reference leak. It consists of the following main parts:a constant pressure flowmeter,a calibration system,a flow inlet system,a measurement and control system. Hydraulically driven bellows is used for the variable-volume chamber of the constant pressure flowmeter. The constant torque servo motor drives a guide system to realize the horizonal motion of piston. A precision grating ruler is used to measure the piston displacement. The measurement and control system maintains the pressure difference between variable-volume chamber and reference chamber pressure. The gas flow standard apparatus can calibrate the throughput with the direct method of measurement and the comparison method of measurement. Its calibration range is l7. 1~1. 22 ×10-5 PaL/s with the uncertainty less than 2%.
出处
《真空科学与技术》
CSCD
北大核心
1997年第3期145-152,共8页
Vacuum Science and Technology
