摘要
目前，三氟乙酸．金属有机沉积（简称TFA-MOD）方法是制备YBaECU307-6（简称YBCO）涂层导体最有应用前景的方法之一。系统地研究了TFA-MOD过程中低温热处理条件（升温速率和气氛）对在LaAlO3单晶基片上生长的YBCO薄膜的影响。研究结果表明，低温热处理的气氛为纯02时，200～250℃区间的分解速度不能太快，否则YBCO薄膜就不均匀和致密，薄膜中会出现较多的孔洞，薄膜的面外取向性也较差，从而影响薄膜的超导性能，然而过慢的分解速度也会使薄膜表面有较大的CuO析出物。分解速度为0．08℃／min时才可以得到结构和超导性能良好的YBCO薄膜。同时研究也发现在低温热处理过程中如果采用Ar和2．5％O2混合气氛则可以减弱三氟乙酸盐分解的剧烈程度，从而使低温热处理的分解速度提高到0．8℃／min，得到的YBCO薄膜同样具有较好的面外取向性和超导性能。
TFA-MOD is one of the most promising methods for depositing YBCO films. In this paper, the influence of calcining condition on the growth of YBCO films deposited on （00ι） LaAlO3 with this method was investigated. The results show that the heating rate of 0.08/min during calcination under O2 atmosphere in 200-250℃ temperature range could result in smooth and uniform YBCO films, while a faster heating rate result in rough film decorated with micron-scale pores together with bad out-of-plane orientation and a slower heating rate leads to bigger CuO segregation. The results also show that the calcination with Ar＋2.5%O2 mixed atmosphere could weaken the explosive decomposition reaction and the heating rate could be 0.8℃/min, at the same time we are able to get high electrical performance YBCO films with good out-of-plane orientation.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2007年第A02期477-479,共3页
Journal of Functional Materials
