摘要
采用磁控溅射技术在PET(聚对苯二甲酸乙二醇酯)衬底上制备了TiO2-CeO2复合薄膜;用X射线衍射仪、扫描电镜和UV-VIS分光光度计分析了薄膜的相组成、表面微观形貌和透射率。结果表明:溅射态的薄膜为非晶态;经150℃退火12 h后,薄膜表面有锐钛矿相颗粒析出;随着溅射功率的增加,薄膜表面的锐钛矿相颗粒数量明显增多,形状接近球形,在功率为100 W时,尺寸约为120 nm;随着溅射功率的增大,薄膜对紫外和可见光的透射率降低;另外,薄膜表面形貌和透射率也受溅射时间的影响。
TiO2-CeO2 thin films on PET（polyethylene terephthalate） substrates were prepared by radio-frequency magnetron sputtering （RF-MS）. Phase constitution, surface morphology and UV-VIS transmittion of the composite films were investigated with XRD, SEM and UV-VIS spectral photometer. The as-deposited films deposited on PET were all amorphous. The crystal phase of the films is only anatase TiO2 after the films annealed at 150 ℃ for 12 h. With increasing sputtering power, crystal grains increased. The grain shape is sphere. When sputtering power is 100 W, the size of grains is about 120 nm. The enhancement of sputtering power reduce the transrnittion of the films. Different sputtering times change the surface morphology and transmittion of the composite films.
出处
《机械工程材料》
CAS
CSCD
北大核心
2007年第9期37-40,72,共5页
Materials For Mechanical Engineering
