摘要
首先介绍了在半导体芯片制造中,环氧树脂探针卡的作用及其制作工艺。基于探针的弯曲需严格符合一定的设计规格,阐述了半自动弯针机的设计,详细说明基于MicroLynx控制器对步进电机的控制,实现对探针的针尖长度及弯曲角度的精确控制。该项技术已应用于探针卡的实际生产中。
The Cantilever probe card used in semiconductor wafer testing is introduced in this paper.Based on the high precision requirement of probe bending,the semi-auto probe bender is described.The PLC based control system is analyzed in details,for the control of tip length and bend angle of probes.The semi-auto Probe Bender is implemented on the production to meet process improvement goal.
出处
《工业控制计算机》
2007年第11期35-35,49,共2页
Industrial Control Computer
