摘要
采用弧辉等离子沉积工艺在镁合金AZ91表面涂覆了TiN薄膜。研究了沉积温度对膜层的厚度、结合力及硬度的影响。用扫描电镜（SEM）、X射线衍射（XRD）和辉光放电光潜（GDS）分析了涂层的成分和微观结构。结果表明，随着控制温度的升高，膜层厚度呈缓慢增加的趋势，但温度过高或过低结合力明显下降，以160～180℃最佳。180℃时的硬度HK0.01最高，达14630MPa。
TiN film has been deposited on AZ91D magnesium alloy by arc-glow plasma depositing in order to improve its antiwear performance. The effects of depositing temperature on the thickness, adhesion strength and hardness of TiN film have been studied in this paper. The composition distribution and microstructure of the coating have been surveyed by scanning electronic microscopy （SEM）, X-ray diffraction （XRD） and glow discharge spectrum （GDS）. The results indicate that the thickness increases with temperature increasing. However, too high or too low temperature is not beneficial to the adhesion strength of coating. The best adhesion strength is obtained at 160-180 ℃. Also, the highest surface hardness HK0.01 of about 14630 MPa is got as the coating deposited at 180 ℃.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2007年第11期2036-2040,共5页
Rare Metal Materials and Engineering
基金
山西省自然科学基金(20041065)
