摘要
本文采用射频反应磁控溅射技术制备氧化铬涂层并在不同温度及不同的保温时间内进行热处理,通过X射线衍射、纳米压痕、摩擦磨损测试仪等研究温度及保温时间对涂层结构、表面形貌、硬度、弹性模量、耐磨性及涂层与基体间的结合力进行研究。研究表明低于其晶化温度(400℃)进行退火对其结构影响不大,其力学性能没有明显提高,而在高于其晶化温度(500℃)进行退火,其结构变化比较明显,同时其力学性能显著提高,其硬度从初始态的12.3 GPa提高到26 GPa,相同试验条件下的磨损量也显著降低,从初始态的1.1×10-3 mm3降低到1×10-5 mm3。涂层与基体之间的结合力随着退火温度的提高、保温时间的延长有明显的改善。保温时间对其结构影响不大,但对其表面形貌有一定的影响,在低于晶化温度延长保温时间表面平均粗糙度降低,而高于晶化温度延长保温时间表面平均粗糙度增加。
Chromium oxide coating prepared by RF magnetron sputtering was annealed with different regimes. The influence of annealing temperature/time on the micro-structure, surface morphology and mechanical properties were examined by XRD, AFM, nano-indenter and Universal Micro-tribometers. The results showed that the chromium oxide sputtered at room temperature with low oxide flux is amorphous. After annealed at 400℃ that is lower than the crystallization temperature there is a little change in structure and mechanical properties. But, after annealed at 500% that is higher than the crystallization temperature the change becomes bigger. The hardness and wearability both rapidly increases at a higher annealing temperature, ie., the hardness increases from 12.3GPa to 26GPa and the worn volume from 1.1×10^-3 mm^3 to 1×10^-5 mm^3. The bond strength between coating and substrate is obviously affected by annealing temperature/time, because the residual stress dissipated and interfacial atoms interdiffused. Annealing time has little effect on the structure and mechanical properties, but when the annealing temperature is lower than crystallization temperature the surface roughness is reduced with lengthened annealing time and vice versa.
出处
《真空》
CAS
北大核心
2007年第6期43-47,共5页
Vacuum
基金
国家自然科学基金项目(50471091)资助
关键词
磁控溅射
热处理
氧化铬
硬度
耐磨性
结合力
magnetron sputtering
annealing
chromium oxide
hardness
wearability
bond strength
