摘要
在微机械陀螺性能健壮性设计的研究中,为了解决微陀螺性能解析的高精度和计算时间的问题,以体微机械加工技术制备的音叉振动式微机械陀螺结构为研究对象,提出了基于子结构法的微结构动态性能解析法.在实现了微陀螺的高精度解析和分析的基础上,进行了微陀螺弹性梁优化设计,得到了性能优良的微陀螺弹性梁结构.通过实例解析,不仅验证了基于子结构法的微结构动态性能解析法的有效性,而且证明了其在微机械陀螺性能设计中的潜在价值.
In the robust design of the performance of micromachined gyroscope, to solve the problems concerning to the high precision and the computing time of performance analysis of micromachined gyroscope, a tuning fork vibratory micromachined gyroscope fabricated by the bulk silicon micromachining technology was studied. The dynamic analysis method of the microstructure based on substructuring method was introduced. Based on the analysis of the micromachined gyroscope with high degree accuracy, the optimum design of micromachined gyroscope elastic bars was carried out. An elastic bar of micromachined gyroscope with excellent performance was obtained. The analysis results not only show the validity of the dynamic analysis method of microstructure based on substructuring method, but also verify the potential values in the design of micromachined gyroscope performance.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2007年第5期797-801,812,共6页
Journal of Shanghai Jiaotong University
基金
国家自然科学基金资助项目(50475019
50390063)
国家高技术研究发展计划(863)项目(2006AA04Z303)
关键词
微机械陀螺
子结构法
优化设计
有限元法
动态分析
micromachined gyroscope
substructuring method
optimal design
finite element method （FEM）
dynamic analysis
