摘要
介绍了复合调整式高压电源的总体设计方案，提出实现高压电源高稳定度的关键技术措施。
The general design project of a combined regulation type high voltage power supply is described. The key technical measures for obtaining high stability of the power supply are introduced.
出处
《微细加工技术》
1997年第2期14-19,共6页
Microfabrication Technology
关键词
电子束曝光机
高压电源
复合调整
高稳定度
electron beam exposure machine
high voltage power supply
combined regulation
high stability
