摘要
通过对保角变换的精确修正，推导出了设计均匀场电极的简易解析公式，使电极的紧凑性和均匀性有很大改进。将此电极运用于准分子激光系统（KrF248nm），获得了较大宽度的均匀放电。
By modification of the conformal transformation, a simple analytic exprebsion is derived to design uniform-field electrodes, and a much improvement can be obtained on compactness and field uniformity. With such electrodes in an excinler laser system(KrF 248 nm), the wide and uniform gas-discharge width is achieved.
出处
《量子电子学报》
CAS
CSCD
1997年第4期363-369,共7页
Chinese Journal of Quantum Electronics
关键词
均匀场电极
保角变换
准分子激光
uniform-field electrodes, conformal transformation, excimer laser
