摘要
采用sol-gel法,在普通载玻片上使用旋转涂覆技术生长了具有c轴择优取向生长的ZnO薄膜。采用热分析、XRD、SEM等手段对薄膜样品进行了表征。热分析结果表明,二水醋酸锌-乙醇胺-乙二醇甲醚体系sol-gel的热分解过程与纯二水合乙酸锌的分解过程大相径庭。ZnO薄膜的sol-gel分解趋于在较窄的温度范围内一步完成。样品在XRD图谱中表现出明显的c轴择优取向。此外,SEM照片也表明:ZnO薄膜样品中间区域和边缘区域的表面形貌相差甚远。探讨了预热处理温度、退火温度等工艺条件对ZnO薄膜的结构性能的影响,最佳的预热处理温度被认为在ZnO相完全生成温度附近。
e-axis orientation zinc oxide thin films on glass substrates were prepared by sol-gel spin coating technique,which were characterized by DSC/TGA,X-ray diffraction and SEM. DSC/TGA results showed that thermal decomposition processes of the precursors were widely different from those of zinc acetate dihydrate,monoethanolamine and 2-methoxyethanol. SEM photographs aslo showed that the surface morphology of the middle areas were widely different from those of the fringe areas. In addition, the influences of preheating temperature and annealing temperature on the structural properties of ZnO thin films were also discussed, the optimal preheating temperature was near the forming temperature of ZnO phase.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2007年第12期2015-2017,2020,共4页
Journal of Functional Materials
基金
教育部高等学校骨干教师资助计划资助项目(GG-430-11902-1010)
