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大型非球面能动磨盘精磨技术 被引量:7

Fine grinding technology of active lap for large aspherics
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摘要 计算机控制能动磨盘加工技术是集传统加工技术、能动技术和数控技术为一体的大型非球面光学元件先进制造技术。基于Preston方程,通过对能动磨盘结构的研究,建立了工件的能动磨盘磨削函数;分析了能动磨盘分别位于工件中心孔和外缘处产生的边缘效应,并建立相应的边缘效应函数;由此得到用于描述能动磨盘加工的数学模型。在该模型的指导下完成了Φ1200 mm(F/1.5)非球面主镜能动磨盘精磨加工,实现了主镜面形误差的均方根值从4.5μm(峰谷值26.8μm)收敛到0.36μm(峰谷值2.8μm)。 Computer Control Active Lap (CCAL) processing is an advanced optical manufacture technology for large aspheric optical dements, which combines classical manufacture technology with active technology and numerical control technology. Based on Preston Equation and the investigation of active lap structure, the workpiece removal function with active lap is founded. By analyzing the edge effects when the lap approaches to both the center hole and the outer edge of workpiece,its edge effect functions are also founded. And the mathematical model is set up to describe active lap manufacture. Under the direction of the model, a ~1 200 mm (F/1.5)aspheric primary mirror has been grinded with active laps. The root-mean-square and the peak-to-valley values of its surface figure error converge from 4.5 μm to 0.36 μm and from 26.8 μm to 2.8 μm respectively.
出处 《红外与激光工程》 EI CSCD 北大核心 2007年第6期873-876,共4页 Infrared and Laser Engineering
基金 国家973资助项目
关键词 光学加工 计算机控制能动磨盘 非球面 Optic manufacture CCAL Aspheric
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