摘要
以新型的小型化CVD金刚石膜沉积设备为对象,设计了基于微控制器的集成控制系统,实现了对小型化设备无人看守状态下CVD金刚石膜的制备。阐述了采用混合信号SOC单片机C8051F020的系统硬件结构,实现了制备过程中各种物理量的实时采集。建立了基于模糊PID控制器混合算法的控制策略并对其进行优化。系统运用表明:该系统对沉积CVD金刚石的工艺参数控制精确,数据记录可靠,人机界面完善,系统能够长时间稳定运行,可以制备出高质量的CVD金刚石涂层。
A kind of intelligent integrated control system based on micr.ocontroller was developed for the miniature EACVD system which can realize the deposition of the diamond film under unmanned situation. The hardware structure of the realtime control system based on C8051F020 microcontroller was described in detail. A fuzzy-PID compound control method was established and optimized. The deposition of CVD diamond coating and thick film show that the process parameters can be accurately controlled and the data can be reliably recorded. The system can apply stable long-term operation, and the human-machine interface is very friendly. It can be used for high quality CVD diamond coated cutting tools deposition.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2007年第6期1058-1063,1072,共7页
Bulletin of the Chinese Ceramic Society
基金
国家自然科学基金(No:50605032)
江苏省自然科学基金(BK2006189)
江苏省高校研究生创新计划项目(XM05)
