摘要
用Ｈｅ－Ｎｅ激光器作光源、ＣＣＤ摄像机－微机系统作探测器，应用一个干涉图法在泰曼干涉仪上实现了自动计算干涉图，不但再现了二维等高线图，而且获得了三维波面面形。作为实例。
An automatic calculation interferogram is realized on Twyman inter- ferometer by one interferogram method using He Ne laser as a light source and CCD camera-computer system as a detectors.As a result,not only two dimensional contour line map is reconstructed,but also three dimensional wave front is obtained.As an example,the unparallelism of a glass plate is measured.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
1997年第3期179-182,共4页
Semiconductor Optoelectronics
关键词
泰曼干涉仪
干涉图
CCD摄像机
电荷耦合器件
Twyman Interferometer,Interferogram,CCD Camera,Characteristic Measurement
