摘要
在简要介绍纳米TiO_2功能薄膜各种制备技术的基础上,着重对近年来研究TiO_2薄膜及其复合薄膜采用的微区分析技术及应用研究进展进行了综述,并比较了各种微区分析技术的优缺点。
In this review, the various methods for preparation of nanometer TiO2 functional thin film are introduced firstly. Then the progress in research on micro-area analysis techniques and their applications in recent years for titanium dioxide thin film and its composite thin film are reviewed with great emphasis. Meanwhile, the advantages and weak points of different micro-area analysis techniques are compared and discussed.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2007年第F11期51-56,共6页
Materials Reports
基金
国家自然科学基金(No.50572021)
河北省自然科学基金(No.E2005000130)
关键词
微区分析
纳米TIO2薄膜
表面
micro-area analysis, nanometer TiO2 thin film, surface
