摘要
综述了纳米测量方法,主要可归纳为光学和非光学两大类测量技术。通过对各种方法的测量原理、测量装置、测量准确度及其亟待解决问题的分析,阐明了纳米测量技术的发展现状、发展趋势,对纳米测量技术的发展具有一定的推动和指导作用。
Many techniques of nanometre measurement are introduced, including both optics and non-optics. Theories, accuracy, equipment and problems of these techniques have been analyzed respectively and the present development and future direction are illuminated. This review will play a promote and guiding role in nanometre measurement.
出处
《宇航计测技术》
CSCD
2007年第6期23-27,共5页
Journal of Astronautic Metrology and Measurement
关键词
纳米技术
测量
激光干涉仪
Nanometre technology Measurement Laser interferometer
