摘要
本文叙述了盖得的发明专利,从初期的汞扩散泵到分馏油扩散泵的演变过程。讨论了泵体结构、喷咀型式、泵油性能和几个关键技术问题。现代油扩散泵的何氏系数达0.65以上,返油率达10-5 mg/cm2.min,1 kW功率抽气量可达200 Pa L/s。最后对泵的性能、结构和应用前景作了展望。
States Gaede＇s invention patent and the evolution history from the early mercury diffusion pump to oil fractionating diffusion pump. Discusses the construetion of pump cylinders, type of nozzles, properties of oil used and some key technological problems. Nowadays the Ho coefficient of oil diffusion pumps has come up to over 0.65, with oil back-streaming rate 10^-5 mg/cm^2·min and throughput of gas 200 Pa L/sec per lkW. An outlook is given to the performance, construction and applications of diffusion pumps
出处
《真空》
CAS
北大核心
2008年第1期1-16,共16页
Vacuum
关键词
扩散泵
何氏系数
气流量
diffusion pump
Ho coefficient
throughput of gas
