摘要
通过蒸发和磁控溅射镀膜的方法，交替沉积Ｃ６０和金属Ｐｄ膜，制备了不同周期和厚度比的Ｃ６０／Ｐｄ多层膜。利用透射电子显微术（ＴＥＭ）研究了这些薄膜退火前后的结构。
C 60 /Pd multilayers with various periods were prepared in vacuum by evaporating and sputtering alternately. Both structural properties of as deposited and annealed multilayers have been studied with transmission electron microscopy(TEM).
出处
《电子显微学报》
CAS
CSCD
1997年第4期489-490,共2页
Journal of Chinese Electron Microscopy Society
