摘要
提出了一种基于正交衍射光栅作为测量基准元件的二维激光干涉测量系统.利用正交光栅的空间对称级的衍射光进行干涉,基于多普勒效应,采用偏振检测的方法获得相位相差90°的干涉信号.通过光电检测把获得的正弦和余弦信号进行相位细分,系统可在平面二维方向上实现纳米级的分辨率.该系统相比其他干涉测量系统,测量结构紧凑,环境因素对其影响较小,可应用于较大行程的平面微位移精密检测.
2D laser interferometer system was developed based on plane orthogonal diffraction grating. According to Doppler effect and polarization optics, the interference fringe with 90° phase difference was acquired by using orthogonal grating to interfere the diffraction. With photoelectric detection circuit and measurement software, sine and cosine signals were subdivided in phase, and nano-resolution could be achieved in 2D displacement. Compared with the other interferometer, the system is compact and reduces influence of the environment on measurement accuracy, and can be used to detect 2D micro-displacements with larger scale.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2007年第4期311-314,共4页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50275048)
关键词
二维光栅
位移测量
干涉
2D grating
displacement measurement
interference
