摘要
应用电磁场分析中的一种新方法———半解析法,对一种典型的非平衡磁控溅射系统进行了磁场分析.结果表明,应用半解析法计算,求解变量少、方法简单,而且计算精度高,该方法相对于等效源法有严密的理论依据,标量位函数的表达式为级数解析式,有利于场强的计算,更有利于优化设计.
Half-analytical method is a new method of calculating electromagnetic field. In this paper, this method is applied to analyzing magnetic field in unbalanced magnetron sputtering system. There are less unknown variables with this method in the solving process and the result has high accuracy. This method is better theoretically founded compared with the equivalent source method. The expression of scalar potential function is an analytic series, which favors calculating field intensity and optimization.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2008年第2期996-1000,共5页
Acta Physica Sinica
关键词
非平衡磁控溅射
半解析法
标量磁位
磁场强度
unbalanced magnetron sputtering, half-analytical method, scalar magnetic potential, magnetic intensity
