摘要
采用溶胶-凝胶法制备了SiO2-TiO2平板光波导,计算了平板光波导通光条件,分析了硅/钛溶胶-凝胶材料的热性能,观测了平板光波导的结构形貌,并测试了其通光损耗。结果表明:经过200℃,30 min干燥处理的凝胶薄膜呈疏松多孔状态,对于非对称平板波导,存在芯层通光截止厚度,而且当SiO2-TiO2芯层厚度为0.5μm时,SiO2下包层厚度至少有6μm才能防止1550 nm波长光泄露入单晶硅衬底中。制备的光波导对于1550 nm波长光传输损耗最小值为0.34 dB/cm。
SiO2-TiO2 planar optical waveguides were prepared with the sol-gel method.The thermal properties of SiO2/TiO2 solgel were analyzed with differential scanning calorimeter（DSC） and thermo gravimetric analysis（TGA）.The morphologies of planar waveguides were characterized by SEM and AFM.The propagation loss of the planar optical waveguide at 1 550 nm was measured.The experimental results demonstrate that the gel thin film with the drying processing at 200 ℃ in 30 min presents the porous structure,and for the unsymmetrical planar waveguide,there is a light flux cut-off thickness for a core layer.When the thickness of SiO2-TiO2 core layer is 0.5 μm,the cladding thickness should be at least 6 μm to prevent 1 550 nm light from propagating into the substrate of monocrystalline silicon.At present,the minimum propagation loss of the planar optical waveguides at 1 550 nm is 0.34 dB/cm.
出处
《应用光学》
CAS
CSCD
2008年第2期293-297,共5页
Journal of Applied Optics
基金
国家"863"计划(2005AA311030)
国家自然科学基金(50575086)
关键词
光波导
溶胶-凝胶
光学设计
传输损耗
optical waveguide
sol-gel
optical design
propagation loss
