摘要
利用由傅里叶变换光谱仪、变温杜瓦瓶、真空系统、微型计算机组成的薄膜材料变温光学特性测试系统，研究了在不同基板温度制备的ＰｂＴｅ、ＺｎＳｅ单层薄膜的变温光学特性．得到了薄膜状态下这两种薄膜材料的折射率及其温度系数．观察了基板温度对薄膜折射率温度系数和短波吸收限的影响，给出了沉积这两种材料的最佳基板温度．
By a set of temperature coefficient of refractive index test system which consists of IRFT spectrometer,variable temperature liquid nitrogen cryostat, vacuum system and micro computer, the temperature dependence of optical parameters of PbTe、ZnSe single layer is studied. PbTe and ZnSe samples are deposited at different substrate temperatures by PVD method. Their refraction indices and temperature coefficient are measured. The influence of substrate temperature on temperature coefficient of refractive index and short wave absorption limits is discussed. The best substrate temperature of these materials is also defined.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
1997年第10期69-71,共3页
Journal of Shanghai Jiaotong University
关键词
变温光学特性
薄膜光学
碲化铅
硒化锌
低温特性
infrared coating materials
temperature dependence of optical parameters
substrate temperature
