摘要
研究了热丝CVD系统中预沉积无定形碳对金刚石成核的促进作用，分析了金刚石成核的特征和机理，探索了无定形碳上金刚石成核的条件，并由此实现了YG8硬质合金上金刚石的成核和生长。
The promotion of diamond nucleation by predeposition of amorphous carbon in Hot-filament chemical vapor deposition system was studied. The feature and mechanism of diamond nucleation were analysed, and the condition for diamond nucleation on predeposited amorphous carbon was also investigatal.Through predeposition of amorphous carbon, the nucleation and growth of diamond on carbide substrate YG8 were realized.
出处
《材料科学与工艺》
EI
CAS
CSCD
1997年第3期76-78,共3页
Materials Science and Technology
关键词
化学气相沉积
金刚石薄膜
成核
无定形碳
Chemical vapor deposition
diamond films
mucleation amorphous carbon
