摘要
应用粒子模拟软件对空心阴极放电进行粒子模拟,得到放电稳定状态时的电势分布和带电粒子的密度分布。利用模拟结果研究了放电电压为-800 V,气压为1 Torr,基板偏压为-250 V和-400 V放电条件下的空心阴极放电特性。结果表明,放电中存在空心阴极效应,放电时的等离子体区在阴极管的中心轴附近,且改变基板偏压对电子密度、粒子密度的空间分布有所影响,随着基板负偏压增加更有利于沉积均匀致密的薄膜。
A hollow cathode discharge（ HCD）was investigated by means of a two -dimensional parti- cle - in - cell model. Our calculations were carried out for a hollow cathode dc discharge in argon, operating at moderate（ -800 V）voltage and at low（ 1 Torr）pressures. The distribution of the electric field, electron density and ion density has been calculated. The results show that there exists a hollow cathode discharge effect in the discharge process and the major discharge is taken place at the axis of cylindrical cathode. On the other hand the influences of substrate voltage on distribution of electron and ion density were also investigated.
出处
《江西科学》
2008年第2期208-211,共4页
Jiangxi Science
关键词
空心阴极放电
数值模拟
粒子模拟
Hollow cathode discharge, Numerical simulation ,Particle -in -cell model
