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基于隧道效应的纳米级振动检测及测量 被引量:4

Measurement and Detection of Nano Level Vibration Based on Tenneling Effect
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摘要 扫描隧道显微镜是高精度纳米级表面测量仪器,由于扫描隧道显微镜工作时的隧道间隙在几个纳米左右,外界任何微小的随机振动传递到仪器都会对测量结果产生影响,失去被测物表面的特征信息。因此,研究微振动,特别是低频纳米级振动在隧道状态下对隧道间隙的影响具有很重要的意义。实验表明,实验系统在隧道状态下对纳米级振动有很好的幅频响应。 Scanning tunneling microscopy is a nano level surface measurement instrument with high precision, because of the several nanometer tunneling gap, external random low frequency vibration has great influence on the measurement result. It is very useful to study the influence of the nano level vibration on the tunneling gap. Experiments demonstrate that the system has good amplitude-frequency response to the nano level vibration in the tunneling state.
出处 《电子测量与仪器学报》 CSCD 2008年第2期6-10,共5页 Journal of Electronic Measurement and Instrumentation
基金 国家自然科学基金"基于隧道效应的纳米级振动传感器的研究"资助项目(编号:60372006)
关键词 扫描隧道显微镜 隧道效应 隧道间隙 幅频响应 scanning tunneling microscopy, tunneling effect, tunneling gap, amplitude-frequency response.
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参考文献5

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