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Φ200mm CZSi复合式热场的数值模拟研究 被引量：2

Numerical Simulation of Composite Thermal Field in Φ200mm CZSi Crystal Growth
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摘要 对国产TDR-80型单晶炉的复合式热场系统进行了优化设计,建立了不同条件下的理论模型,采用有限元数值模拟的方法分析了主加热器的延伸率、埚径比和熔体高度变化对直拉硅单晶生长中的温度梯度和热流密度分布的影响,为提高晶体生长速率和质量提供了必要的理论依据。 The traditional thermal field in a TDR-80 CZSi furnace was improved by optimized design. Mauhematical modeling was constructed under different conditions. Meanwhile, numerical simulation was conducted by the finite element method. Effects of the extend ratio of double-heater, crucible size and melt height on the distributions of temperature and heat flux were obtained. The results provide a theory for the increasing speed of crystal growth and to obtain a crystal in high quality.
作者 任丙彦 李洪源 张燕 张兵 郭贝
机构地区 河北工业大学材料学院
出处 《稀有金属》 EI CAS CSCD 北大核心 2008年第2期161-164,共4页 Chinese Journal of Rare Metals
基金 国家自然科学基金(60576002)资助项目
关键词 CZSI 热场 有限元 双加热器 热对流 CZSi thermal field finite element method double-heater heat convection
分类号 O782 [理学—晶体学] TN304 [电子电信—物理电子学]
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参考文献9

  • 1REN Bingyan,ZHAO Long,ZHAO Xiuling,WANG Huixian,CAO Zhongqian,ZHU Huimin,FU Hongbo.Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth[J].Rare Metals,2006,25(1):7-10. 被引量：3
  • 2王学锋,翟立君,周旗钢,王敬,戴小林,吴志强.大直径直拉硅单晶炉热场的数值模拟[J].稀有金属,2004,28(5):890-893. 被引量：11
  • 3Liu Lijun, Tomonofi Kitashima, Koichi Kakimoto. Global analysis of effects of magnetic field configuration on malt-crystal interface shape and melt flow in CZ-Si crystal growth [J]. Journal of CrystalGrowth, 2005, 275(1-2): e2135.
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二级参考文献12

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稀有金属
2008年 第2期

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