摘要
在常温下，用sol—gel法在普通玻璃和单晶Si衬底上制备了V2O5薄膜，并将样品在空气中于500℃进行热处理。通过XRD和SEM对比分析了不同衬底上样品的微观结构，用分光光度计测试了玻璃衬底上样品在350～850nm的光学特性。结果表明：在玻璃和Si衬底上分别得到了β-V2O5和β-V2O5薄膜，两种样品的纯度高、相结构单一和结晶度好。β-V2O5薄膜的光学带隙Eg为2．33eV。
Vanadium pentoxide （V2O5） thin films were deposited on quartz glass and monocrystalline silicon substrates by sol-gel technique at room temperature. The deposited thin films were annealed at 500 ℃. The structural features and surface morphology were investigated by XRD and SEM, optical transmission and reflection characteristics were measured by spectro-scope at 350 - 850 nm. The results show that β-V2O5 and α-V2O5 thin films have high purity, monophase and good crystallinity. The optical band gap （Eg） of β-V2O5 thin film is about 2.33 eV.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2008年第5期9-11,共3页
Electronic Components And Materials
基金
国家自然科学基金资助项目(No.50272027)
