期刊文献+

一种微电容式传感器检测电路的分析与改进 被引量:14

Analysis and Improvement of an Interface Circuit of Capacitive Sensors
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摘要 介绍了一种本实验室开发的集成传感器,它实现了敏感电容和接口电路在一块芯片上的集成。重点分析了它的接口电路,基于施密特触发器构建,实现敏感电容值以及参考电容值与频率值的转换,通过对两频率求差来抑制各种共模干扰。对样片进行了测试,输出频率与理论值有较大的偏差。通过分析,给出了测试结果发生偏差的原因。最后,给该电路设计了启动电路,改进了CMOS开关控制电路,重新对电路的结构进行了设计,实现了与实验室新一代传感器的集成。 A new integrated capacitive sensor is introduced briefly. The sensitive capacitance and the interface are integrated into one chip. The interface circuit, which is based on the Schmitt trigger, works as a capacitor-frequency converter. A differential frequency circuit is designed following the oscillator. It can reduce the common-mode distribution. The output frequency displays a large difference from theoretic calculation during testing. The reason for the difference is analyzed. Circuit schematic and parameters are redesigned to realize the integration with a new sensor designed in our laboratory.
出处 《传感技术学报》 CAS CSCD 北大核心 2008年第2期265-268,共4页 Chinese Journal of Sensors and Actuators
基金 国家自然科学基金重点项目资助课题(90607002)
关键词 MEMS 微电容式传感器 接口电路 频率输出 MEMS capacitive sensor interface circuit frequency output
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参考文献5

  • 1Nihtianov S N,Shterev G P,Iliev B,et al.An Interface Circuit for R-C Impedance Sensors with a Relaxation Oscillator[J].IEEE Trans.Instrumentation and Measurement,2001,50 (6):1563-1567.
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二级参考文献6

  • 1彭东林,杨伟,张兴红,刘小康.差频式位移传感器的研究[J].工具技术,2004,38(6):55-57. 被引量:2
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