摘要
介绍了一种“针尖前移”的在片SOLT校准方法,使用这种校准方法可以将测试参考面直接校准到内部被测件,从而可以进行无去内嵌(De-embedding)操作的直接测量。通过对在片平面螺旋电感的测试验证,证明这是一种精确高效的新校准方法。
The tip-extension＇ SOLT calibration, after which the measurement references plane arrive at inner-DUT, has been developed for direct measurement without de-embedding of on-wafer DUTs. The key is to characterize new SOLT standards. Verified by a spiral-inductor measurement, it is a novel calibration with more accuracy and more efficiency.
出处
《微波学报》
CSCD
北大核心
2006年第B06期135-137,共3页
Journal of Microwaves
