摘要
借助EPMA、XRD、SEM、纳米压痕和划痕仪研究了采用磁控溅射在硬质合金基体上沉积的TiN、Ti(C,N)和(Ti,Al)N涂层的组织结构和力学性能。研究表明,TiN涂层的晶粒形貌为典型的喇叭口结构,呈(220)生长织构;Ti(C,N)与(Ti,Al)N涂层为平直的柱状晶结构,但表现出不同的取向。Ti(C,N)涂层表现出最高的硬度,TiN涂层则表现出与基体更好的结合力,(Ti,Al)N涂层由于其好的高温稳定性表现出最好的切削性能。
The microstructure and mechanical properties of TiN, Ti （ C, N ） and （ Ti, A1） N coatings deposited on ce- mented carbide substrates by magnetron sputtering have been characterized by electron probe microanalysis （EPMA）, X -ray diffraction （XRD）, scanning electron spectroscopy （SEM） and nano-indenter and scratcher. The results show that the crystal grains of TiN coating have a typical bell-mouthed structure with （220） preferred orientation. Both Ti（ C, N） and （Ti, Al） N coatings show straight columnar structures but different preferred orientations. Ti（ C, N） coating exhibits the highest hardness. TiN coating presents better adhesion with substrate. （Ti, Al）N coating has the best cutting properties due to its good thermal stability.
出处
《矿冶工程》
CAS
CSCD
北大核心
2008年第3期114-116,共3页
Mining and Metallurgical Engineering
关键词
涂层
微观结构
硬度
结合力
切削性能
coating
microstructure
hardness
adhesion
cutting property
