摘要
激光诱导扩散中曝光区的大小在10μm数量级，其温度分布的测量是比较困难的．该文报道一种曝光区中极微小面元温度的不接触测量．文中介绍了测量原理、实验装置，给出了实验结果，并特地介绍了测量系统的定标．
The determination of the temperature distribution in the exposed region is something difficult since the size of the exposed region in laser assisted diffusion is only of the order 10 microns. Remote sensing of the temperature of the extrasmall areas in that exposed region is reported. The theoretical principle, experimental set-up and the experimental results are presented, and especially, the callibration of the temperature sensing system is discussed in detail.
出处
《应用科学学报》
CAS
CSCD
1997年第4期413-417,共5页
Journal of Applied Sciences
基金
国家自然科学基金
国防科工委资助
关键词
激光诱导扩散
温度测量
半导体
不接触测量
laser assisted diffusion,laser assisted processing,measurement of temperature,semiconductor
