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Al_2O_3基陶瓷基片的制备及其性能 被引量:2

Study on Preparation and Properties of Alumina Ceramic Substrate
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摘要 以高纯的α-Al2O3为原料,以烧滑石、碳酸钙、高岭土的形式向其中加入MgO、CaO、SiO2等烧结助剂,采用凝胶注模工艺制备出Al2O3基陶瓷基片.实验结果表明:在烧结温度为1530℃时得到了密度为3.7 g/cm3致密烧结体,晶粒大小在3~5μm;在20~1000℃范围内,样品的热扩散率为0.0668~0.0154 cm2/s,其大小随着温度的升高而降低;在1 kHz^1 MHz测试频率范围内,介电常数随频率的升高先降低,之后保持不变;介电损耗随频率的升高先减小,之后又增大. Al2O3 matrix ceramic substrate was prepared by gelcasting technology using high purity α-Al2O3 powder as raw material and the sintered steatite, calcium carbonate, kaolin clay as sintering aids. The results show that the sintering temperature of the green bodies is between 1 530℃ and 1 550℃. The microstructures, thermal and electrical properties of the sintered bodies were studied by using SEM and so on. And the results of experiments show that the grains arrange uniformly and orderly, and the pore ratio is low. The thermal diffusivi- ty is 0. 0 668 - 0. 0 154 cm^2/s from 20℃ to 1 000℃, and reduces with increasing the temperature. In the range of the testing frequencies, the dielectric constant is 9.3 - 9.4 and the dielectric loss angle tangent is 2.2 × 10^ -3 ~ 5.4 × 10^ -3. The dielectric constant firstly decreases and then keeps constant as the frequency increases. The dielectric loss angle tangent reduces firstly, and then increases.
出处 《大连交通大学学报》 CAS 2008年第3期54-57,共4页 Journal of Dalian Jiaotong University
关键词 AL2O3 凝胶注模 显微结构 物理性能 alumina gelcasting microstructure physical properties
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参考文献8

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共引文献35

同被引文献28

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