摘要
光纤接入网络的快速发展对光纤传输的光学性能方面提出了严格的要求。文中阐述了电子束离子辅助沉积系统在室温下镀制光纤端面近红外1520nm～1580nm范围增透膜的应用。讨论了膜料的选择、膜系的设计以及镀制过程中光学监控的工艺参数,制备出了光学性能较好的薄膜。
The requirement for the performance of optical fiber device has been raised as the highspeed development of access network. The applications of ion source in ion assistant deposition for an antireflection coating in optical fiber at 1520nm - 1580nm as the near-infrared range under the low temperature are described. Choosing coating materials, designing the coating and manufacture are also discussed. The result of measuring turned out that both the optical quality got the require.
出处
《长春理工大学学报（自然科学版）》
2008年第2期43-45,共3页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
国家863计划资助项目
关键词
离子束辅助沉积
红外增透膜
光纤
膜厚控制
ion assistant deposition
infrared antireflection coating
optical fiber
monitoring of film thickness
