摘要
研制了一种新的大面积微波等离子体源。由环形波导腔环绕直径３０ｃｍ、高５０ｃｍ耐热玻璃圆筒真空室构成。环形波导内侧开有多个狭缝用来激励产生等离子体。利用该源研究了气压对等离子体参数、击穿功率和熄灭功率的影响。
A new large area microwave plasma source has been developed. The source consists of slots on the inner side which acts as a field applicatior to sustain a plasma. The plasma is contained in a Pyrex glass cylinder with an inner diameter of 30 cm and a height of 50 cm. The source has been used to study the effect of pressure on argon plasma parameters and microwave power for plasma ignition and extinction.
出处
《真空与低温》
1997年第4期187-191,共5页
Vacuum and Cryogenics
关键词
微波等离子体
气压
环形波导
微波技术
Microwave plasma,Pressure,Annular waveguide, Double Langmuir probe.
