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Effect of Annealing Temperature on Structural and Optical Properties of N-Doped ZnO Films

Effect of Annealing Temperature on Structural and Optical Properties of N-Doped ZnO Films
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摘要 Nitrogen-doped ZnO (ZnO:N) films are prepared by thermal oxidation of sputtered Zn3N2 layers on A1203 substrates. The correlation between the structural and optical properties of ZnO:N films and annealing temperatures is investigated. X-ray diffraction result demonstrates that the as-sputtered Zn3N2 films are transformed into ZnO:N films after annealing above 600℃. X-ray photoelectron spectroscopy reveals that nitrogen has two chemical states in the ZnO:N films: the No acceptor and the double donor (N2)o. Due to the No acceptor, the hole concentration in the film annealed at 700℃ is predicted to be highest, which is also confirmed by Hall effect measurement. In addition, the temperature dependent photoluminescence spectra allow to calculate the nitrogen acceptor binding energy. Nitrogen-doped ZnO (ZnO:N) films are prepared by thermal oxidation of sputtered Zn3N2 layers on A1203 substrates. The correlation between the structural and optical properties of ZnO:N films and annealing temperatures is investigated. X-ray diffraction result demonstrates that the as-sputtered Zn3N2 films are transformed into ZnO:N films after annealing above 600℃. X-ray photoelectron spectroscopy reveals that nitrogen has two chemical states in the ZnO:N films: the No acceptor and the double donor (N2)o. Due to the No acceptor, the hole concentration in the film annealed at 700℃ is predicted to be highest, which is also confirmed by Hall effect measurement. In addition, the temperature dependent photoluminescence spectra allow to calculate the nitrogen acceptor binding energy.
机构地区 Department of Physics
出处 《Chinese Physics Letters》 SCIE CAS CSCD 2008年第7期2585-2587,共3页 中国物理快报(英文版)
基金 Supported by the National Natural Science Foundation of China under Grant No 50532070
关键词 P-TYPE ZNO THIN-FILMS ACCEPTOR OXIDATION EPITAXY DOPANT IRON P-TYPE ZNO THIN-FILMS ACCEPTOR OXIDATION EPITAXY DOPANT IRON
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参考文献20

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