摘要
分析了钛表面双层辉光等离子渗钯放电状态中的空心阴极放电,分析认为工件极内部是等电位空心阴极放电,源极与工件极是不等电位空心阴极放电。通过对放电状态下电子的作用分析,论证了源极与工件极距离选择20mm,工件极尺寸选择50mm,气体压力选择20Pa是比较合理的电极结构尺寸和气体压力参数。
Analyzes the hollow cathode discharge in the state that the surface of Ti workpiece electrode is undergoing a double-layer plasma glow discharge for Pd infiltration. The analyzed results are deemed that the inside of the workpiece electrode is in equipotential hollow cathode discharge, while the hollow cathode discharge between source electrode and workpiece electrode is unequipotential. With the effect of electrons in discharging state analyzed, the following structural sizes and pressure parameter are regarded as comparatively rational： the distance between source electrode and workpiece electrode= 20mm, workipiece size=50mm and gas pressure=20Pa.
出处
《真空》
CAS
北大核心
2008年第4期75-79,共5页
Vacuum
基金
北京印刷学院北京市重点实验室(印刷包装材料与技术)开放课题基金资助项目
关键词
钛表面
辉光放电
空心阴极
电极结构
优化
titanium surface
glow discharge
hollow cathode
electrode structure, optimization
