摘要
自行研制紫外微加工系统,系统有效工作范围120 mm×120 mm,最小加工线宽80μm,系统操作简单、运行稳定高效。实验中完成对Nd:YAG紫外激光器、XY扫描振镜以及F-Theta平场透镜设计。实现波长355 nm紫外激光最高平均功率2.13W稳定输出,1h内输出功率波动小于7%;XY振镜最大扫描角度±28°,线性响应速度0.35～0.5 ms;F-Theta视场角为±25°,有效焦距为250 mm。最后对系统存在的问题进行了分析。
The ultraviolet laser micro-processing system was self-developed. Effective working area of the system was 120 mm-120 mm and its minimum linewidth was 80 um. The Nd：YAG ultraviolet laser, XY shake lens and F-Theta lens were designed, and ultraviolet laser in 355 nm with maximum average output power of 2.13 W was achieved with the power fluctuation less than 7% in 1 h. The maximum scan angle of XY shake lens was ±28°, and response speed was less than 0.35-0.5 ms. The field angle of the F-Theta lens was ±25°, and focal length was 250 mm. In the end, some problem in the system was analyzed.
出处
《量子电子学报》
CAS
CSCD
北大核心
2008年第4期478-482,共5页
Chinese Journal of Quantum Electronics
基金
合肥市科学技术局(20051039)资助项目
