摘要
本文仅就用于微马达的微3K－2型行星齿轮减速器的设计，微细电火花（EDM；electricaldischargemachining）加工以及研究中的一些难点作一阐述。
In this article, The design of 3K-2 micro planetary gear reduction driver that is used for micro motor, as well as micro electrical discharge machining (EDM) manufacture and some problems during the study were discussed
出处
《微细加工技术》
1997年第4期49-54,共6页
Microfabrication Technology
关键词
微型机电系统
微马达
行星齿轮
减速器
Microelectromechanical system, micro electrical discharge machining, micro friction
