摘要
采用一种可变腔长的全光纤结构Fabry-Perot(F-P)腔作为传感器件构建了纳米微位移传感系统,利用高精度的压电陶瓷驱动器模拟微位移输出。通过频域插值的方式对F-P腔输出光谱解调,计算出腔长值。实验结果表明,输出光谱解调后的腔长值与压电陶瓷实际的驱动量相吻合,静态位移分辨率小于4nm,最大测量范围可达50μm。采用对光强进行高频调制和相位解调的方式提高了系统的动态测量精度和稳定性。该系统体积小,灵敏度高,重复性好,并且不受电磁场干扰,便于用MOEMS技术制作成微型传感器。
A nano-displacement sensor made from all fiber intrinsic Fabry-Perot（F-P） sensor with variable cavity length is presented. A piezoelectric transducer （PZT） is used to simulate the micro-dlsplacement. The cavity length is calculated by demodulation with frequency spectrum interpolating technology. The measured results coincide with the output by the PZT driver well,whlch demonstrates that the practical resolution is less than 5 nm,and the measurement range is up to 50 High frequency modulation and phasic demodulation technologies are also used to improve the resolution in dynamic meas urement. The system can be integrated and minimized easily by MEMS technique.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2008年第9期1196-1199,共4页
Journal of Optoelectronics·Laser
关键词
光纤F-P传感器
微位移测量
腔长可调
光谱解调
optical fiber Fabry-Perot snesor
nano-displacement measurement
variable cavity length
spectrum de-modulation
