摘要
基于计及边缘效应的矩形平行板的静电力计算公式,建立了扭转微镜的动力学模型,采用Rom-berg数值积分法计算驱动力,并借助迭代修正齐次扩容精细积分法求解非线性动力方程。数值计算结果表明:电压、微镜和电极的几何尺寸等参数都会影响微镜的边缘效应,从而使微镜的动态响应产生较大的误差,在分析微镜力学性能时应考虑边缘效应的影响。
Based on the electrostatic force computation formulas of rectangle capacitor with edge effects, a dynamic characteristic model of a torsion micromirror is illustrated. The load is calculated by Romberg numerical integration procedure and an iterative refinement homogeneous capacity high precision integration method （IRHCHPIM） is put forward to solve the nonlinear different equation. Numerical calculated results show that parameters , such as voltage, geometry dimensions of the micromirror and electrodes etc, can affect the edge effect, which leads a larger error in dynamic analogy. Therefore the edge effects should be considered at analyzing the mechanical characteristics of micromirror.
出处
《传感器与微系统》
CSCD
北大核心
2008年第9期7-10,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(10662003)
广西自然科学基金资助项目(0481028)
关键词
扭转微镜
边缘效应
齐次扩容精细积分
非线性振动
torsion micomirror
edge effects
itcrativc refinement homogeneous capacity high precisionintegration method（IRHCHPIM）
nonlinear vibration
