摘要
采用微波等离子体CVD(MWCVD)法小批量地生产了金刚石涂层刀片,在金刚石薄膜沉积的过程中,研究了碳源浓度对沉积金刚石膜的均匀性的影响。用扫描电子显微镜(SEM)和激光拉曼光谱(Raman)对薄膜的表面形貌和质量进行了表征。结果表明较低的低甲烷浓度适合金刚石涂层刀片的批量生产。
The small batches of carbide inserts were deposited by microwave plasma chemical vapor deposition (MWCVD) method. The uniformity of deposited diamond films were investigated by changing methane concentration. The surface morphology and quality of diamond coatings were examined by Scanning Electron Microscopy (SEM) and Raman Spectroscopy (Raman). The results showed that the uniformity of deposited diamond films using low methane concentration was better than that of using high methane concentration in batch production of diamond coated tools.
出处
《硬质合金》
CAS
北大核心
2008年第3期154-157,共4页
Cemented Carbides
基金
湖北省高等学校优秀中青年科技创新团队资助项目(2004)
湖北省教育厅Q20081505项目
武汉工程大学绿色化工过程省部共建教育部重点实验室2008年度开放基金RGCT200801
武汉工程大学第三届大学生校长基金
武汉工程大学研究生教育创新基金对本研究的支持