摘要
二维纳米胶体球膜版是利用纳米球刻蚀法制备纳米颗粒阵列的前提条件。介绍了一种利用自组装法在基片上直接制备二维聚苯乙烯纳米球膜版的新工艺,讨论了影响获得大面积、高度有序膜版的主要因素,即基片的倾角、悬浮液的浓度、基片的物理化学性质、环境的温度和湿度。利用原子力显微镜对膜版的形貌进行了表征,结果表明,利用这种工艺可以得到排列均匀、面积达平方厘米量级的纳米胶体球膜版,非常适于纳米球刻蚀法的后序工艺。
The formation of 2D colloid nanosphere templates is the prerequisite to fabricate nanoparticle arrays by nanosphere lithography. A new fabrication method which turns colloidal polystyrene nanoshperes into 2D crystals directly on substrates by selforganization was presented. Important parameters for obtaining large, well-ordered templates are discussed,i, e., the inclination angle of substrates, the concentration of suspension, the physical and chemical properties of substrate, and the ambient temperature and humidity. The samples are characterized by atomic force microscopy. The results indicate that the method enables the fabrication of wellordered nanosphere templates with large area up to square centimeter, which is suitable for the consecutive nanosphere lithography process.
出处
《微细加工技术》
EI
2008年第4期47-49,共3页
Microfabrication Technology
基金
北京市教委科技发展基金资助项目(KM200710028005)
关键词
自组装
纳米结构
胶体
二维晶体
self-assembly
nanostructuring
colloid
2D crystals
