摘要
针对微拉伸测试系统支撑梁因塑性变形带来的误差,采用UV-LIGA技术制备出S型支撑弹簧来代替刚性梁,这样即可测量大变形薄膜的力学性能。实验结果表明,用UV-LIGA工艺制备的Ni金属S形弹簧具有良好的均匀性,在较大的变形范围内有很好的线弹性。
Micro-spring is the popular MEMS device in MEMS field. They could support the elastic force for micro-sensor and microactuator. The S-shape springs fabricated with U V-LIGA technology, and the S-shape spring could decrease the error coming from plastic yield of support springs were introduced. Moreover, S-shape springs were used in micro-tensile system which tests mechanical properties of thin film. The results show that S-shape spring of Ni metal is uniform and has good linear elastic ability in the large range deformation.
出处
《微细加工技术》
EI
2008年第4期62-64,共3页
Microfabrication Technology
基金
国家高技术研究发展计划(863)资助项目(2006AA4Z326)
