期刊文献+

超短脉冲激光烧蚀金属薄膜材料的热效应分析 被引量:9

Thermal Effect Analysis of Metal Film Ablation by Ultra-Short Laser Pulses
原文传递
导出
摘要 基于双曲双温两步热传导模型,利用具有人工粘性和自适应步长的有限差分算法,对超短脉冲激光辐照金膜时的温度场进行了一维数值模拟计算。讨论了不同能量密度和脉冲宽度条件下金膜表面温度场的分布情况;分析了电子-晶格耦合系数对薄膜体内温度场的变化规律及电子-晶格耦合至热平衡所需时间的影响。结果表明.激光脉冲的能量密度和脉冲宽度对电子温度的峰值有重大影响;电子-晶格的耦合系数决定了二者的温升速率和耦合时间;电子温度及电子温度的梯度在接近表面区域迅速达到最大值,与之相应的热电子崩力是造成金属薄膜早期力学损伤的主要原因。 Based on the dual-hyperbolic two-temperature and double-step heat conduction model , numerical simulation for the electron and lattice temperatures field of gold film is performed by ultra-short laser pulses, using the finite-difference method with viscositics and adaptive time steps. The temperature distributions of the electron and lattice at the front surface with different laser intensities and pulse widths were discussed. Simuhaneously, it is also analyzed that the effect of the electron lattice coupling coefficient on the change of electron lattice temperature and the time of electron-lattice coupling to thermal equilibrium. Numerical results show that the laser intensity and pulse width impact significantly on the peak of the electron temperature, and electron lattice temperature rising rate and coupling time are determined by the coupling factor. Eectron temperature and its gradient quickly reach the maximum in a small region near the irradiated surface, corresponding with high hot-electron blast force, which could be a dominating mechanism for mechanical damage at the early stage of uhra-short laser ablation.
出处 《中国激光》 EI CAS CSCD 北大核心 2008年第10期1579-1584,共6页 Chinese Journal of Lasers
关键词 激光技术 超短脉冲激光 金属薄膜 热效应分析 双曲双温模型 laser technique ultra short laser pulse metal film thermal effect analysis dual - hyperbolic two temperature model
  • 相关文献

参考文献20

  • 1R. Fork ,C. Cruz, P. C. Becker et al.. Compression of optical pulses to six iemtoseconds by using cubic phase compensation[J]. Opt. Lett ,1987, 12(7): 483-485
  • 2C. Momma, S. Note,B. N. Chichkovet al.. Precise laser ablation with ultrashort pulses[J]. Appl. Surf. Sci, 1997, 109:15-19
  • 3M. D, Shirk, P. A. Molian. A review of ultrashort pulsed laser ablation of materials[J] . J. Laser. Appl. , 1998, 10(1) : 18-28
  • 4C. Momma,B. N. Chichkov, S. Nolte et al.. Short pulse ablation of solid targets[J].Opt. Commun. , 1996, 129:134- 142
  • 5A. Vofel, J. Noack, G. Htittman et al.. Mechanisms of femtoseeond laser nano-surgery of cells and tissues [J]. Appl. Phys. B, 2005, 81:1015-1047
  • 6何飞,程亚.飞秒激光微加工:激光精密加工领域的新前沿[J].中国激光,2007,34(5):595-622. 被引量:95
  • 7P. P. Pronk,S. K. Dutla. J. Squier. Machining of sub micron holes using a femtosecond laser at 800 nm[J]. Opt. Commun. , 1995, 114:106-110
  • 8孟宪赓,赵崇军,邱建荣.飞秒激光在金属纳米材料制备和材料微结构加工中的应用[J].激光与光电子学进展,2004,41(4):48-52. 被引量:8
  • 9S. I. Anisimov, B. L. Kapaliovich, T. L. Perelman et al. Electron emission from metal surface exposed to ultra-short pulse[J].Sov. Phys. JETP,1974,39(2):375-378
  • 10D. Y. Tzou , K. S. Chiu. Temperature-dependent thermal lagging in ultrafast laser heating[J] . Int. J. Heat and Mass Tansfer, 2001, 44:1725-1734

二级参考文献212

共引文献158

同被引文献87

引证文献9

二级引证文献45

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部