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氯硅烷的气相色谱分析 被引量:4

Determination of Chlorosilanes by Gas Chromatography
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摘要 采用涂邻苯二甲酸二乙酯的气相色谱柱对用化学气相沉积法制备SiC纤维的主要原料——氯硅烷直接进样分析,在较短的时间内即可得知每批原料的差异。实验表明,方法操作简便、快速,重复性和精密度较好,重复6次的变异系数均<1%。可用于SiC纤维原料的质量监测。 Chlorosilanes are the essential raw material of SiC fibre made by “CVD(chemical vapour deposition)” method. The purity of chlorosilane affects the quality of SiC fibre obtained. Therefore, a simple and reliable method for the determination of the constituent of chlorosilane is needed. A gas chromatographic method for quantitative analysis of chlorosilane is described in this paper. The gas chromatographic conditions were as follows: column, 10% diethyl phthalate on 6201 support(60 80 mesh), 3m×5mm i.d. stainless steel column; column temp., 60℃; injection temp., 110℃; thermal conductivity detector temp., 140℃ carrier gas H 2 with flow rate of 60 mL/min. The results show that the method is simple and rapid, and has good precision and reproducibility . The coefficient of variation of the method was less than 1%(n=6).
出处 《色谱》 CAS CSCD 北大核心 1997年第3期246-247,共2页 Chinese Journal of Chromatography
基金 "863"计划资助
关键词 气相色谱法 氯硅烷 甲基三氯硅烷 甲基二氯硅烷 gas chromatography, chlorosilanes
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参考文献1

  • 1团体著者,气相色谱实用手册,1980年,277页

同被引文献26

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