摘要
利用溶胶凝胶工艺在Pt电极上沉积了PZT薄膜,选用传统退火及其快速退火工艺制备两种Pt基底(CTA-Pt和RTA-Pt),并采用X射线衍射广角及其ω扫描技术分别研究了Pt电极退火工艺对溶胶凝胶PZT结构及其织构演化的影响。研究结果显示:在传统退火工艺制备Pt电极上沉积的薄膜为(111)择优取向,而在快速退火工艺制备Pt电极上沉积的薄膜表现为(100)织构;分析表明PZT薄膜的织构演化可能与Pt电极在不同退火工艺下的内应力差异有关。
Lead zirconate titanate （PZT） films were fabricated by sol-gel technique on different Pt electrode layers, i.e., CTA-Pt and RTA-Pt, which were subjected to conventional thermal annealing and rapid thermal annealing, respectively. The microstructures and phase compositions of sol-gel-derived PZT films were analyzed. Effects of Pt electrode subjected to different annealing processing on the texture of PZT films were investigated by using ~o-scan X-ray diffraction. The results indicated that the PZT thin films on CTA-Pt electrode were （111）-textured for various annealing temperatures, whereas the PZT films on the RTA-Pt electrode were （100）-textured. A possible scheme in consideration of the internal stress effect of Pt electrode was proposed to explain the texture evolution of films.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2008年第10期1760-1765,共6页
Rare Metal Materials and Engineering
基金
Jiangsu Planned Projects for Postdoctoral Research Funds (0602001A)
China Postdoctoral Science Foundation Funded Project (20080431057)
