摘要
在微机电系统集成设计平台—MEMS Garden基础上,搭建MEMS微引信谐振器的系统级模型,并利用有限元仿真计算2种方法并对模型进行有效性验证,完成谐振器的结构设计,再由仿真得到结构性能参数。研究结果表明,采用系统级方法进行MEMS器件的设计能够在确保求解精度的前提下,显著提高设计效率,缩短设计周期,减小设计成本;所设计的MEMS微引信谐振器的各项性能指标完全能满足引信安全系统的应用要求。
A system-level model of micro-fuse resonator was accomplished by utilizing integrated design platform MEMS garden. Use the finite element simulation method to calculate 2 methods and test the model validity. The structural design of micro-fuse resonator was finished and the structural performance parameters were obtained by simulation. Results show that system-level method can be applied for the design of other MEMS devices to greatly improve the efficiency, reduce designing period and decrease the cost while maintaining a considerable computing accuracy. And the performance of the given micro-fuse resonator can meet requirements of common safety system applications.
出处
《兵工自动化》
2008年第11期3-5,9,共4页
Ordnance Industry Automation
基金
武器装备预研基金项目(9140C360502060C36)
