摘要
振镜式光束偏转／扫描技术已成为一种具有广泛应用潜力的激光束调制手段，它具有调制速度快（高达8kHz），精度高（可达0．06μrad）及易于控制等特点。本文着重介绍了利用振镜实现激光束二维扫描的实验研究，探讨利用这一系统完成激光扫描成像的光路；并探讨了利用激光点扫描成像实现监测／检测物体表面的初步研究结果。
The Galvanometer-based two-axis, con tinuous raster scanning system was developed for real-time image capture system for applications from semiconductor inspection to biological diagnos tics. To assess the performance of galvanometer scanners an imaging system was built and detected for its linearity, pixels stability and gray scale uniformity. It is shown that laser point scanning imaging has powerful capability in fast and high resolution applications. A kind of experinent was done for inspection of the surface of railway wheel pivot.
出处
《激光与红外》
CAS
CSCD
北大核心
1997年第2期95-99,共5页
Laser & Infrared
关键词
激光偏转/扫描
成像系统
激光技术
laser deflection/scanning, scanning imaging, surface inspection
