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超声键合换能系统中劈刀的振动特性分析 被引量:1

Analysis of Vibration Characteristics of Bonding Tool in Ultrasonic Transducer System
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摘要 阐述了Lyapunov指数作为振动信号的混沌判断原理,并对换能系统的振动信号进行分析与研究,计算了换能系统在不同加载压力下劈刀的振动时间序列的Lyapunov指数。结果表明振动信号中的最大Lyapunov指数均大于0,根据混沌理论可以判定换能系统振动信号中存在混沌现象,应该采用混沌的方法研究与分析换能系统振动信号。通过不同加载压力下的振动速度信号的RMS值与最大Lyapunov指数的比较,发现两者随压力变化趋势相同,为进一步研究超声引线键合换能系统的振动特性提供了有价值的参考。 The principle of chaos identification of vibration signal was described, and the vibration signals of ultrasonic wire bonding transducer system were analyzed and researched. It is found that the max Lyapunov exponents of the vibration signals are all above zero by computing Lyapunov exponent in different pressures that of different vibration signals. Then the result of the signals of transducer system contained chaotic phenomenon could be accepted by chaos theory and the vibration time series would be analyzed in the way which based on the chaotic research. Also we compared the max Lyapunov exponent with the velocity RMS. It is found that the trends of the two curves are the same when the force changes, it provides valuable reference for further studying the vibration characteristics of ultrasonic wire bonding transducer system.
作者 吕雷 韩雷
出处 《半导体技术》 CAS CSCD 北大核心 2008年第11期1020-1023,1031,共5页 Semiconductor Technology
基金 国家自然科学基金(50575230 50675227) 国家重点基础研究发展计划(973)项目(2003CB716202) 湖南省自然科学基金面上项目(07JJ3091)
关键词 超声引线键合 LYAPUNOV指数 键合强度 劈刀 ultrasonic wire bonding Lyapunov exponent bonding strength bonding tool
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