摘要
采用磁控溅射的方法制备薄膜型碳纳米管SnO2气敏元件,通过对气敏元件在不同气体中的响应进行分析,以及对气敏元件进行SEM和XRD实验,研究碳纳米管SnO2材料的气敏性能。实验表明:磁控溅射碳纳米管SnO2气敏元件对NO2气体有很高的灵敏度,对其他气体不敏感。
The carbon nanotubes-SnO2 film gas sensor was prepared by magnetron sputtering. Its sensitive responses to different gases were tested by SEM and XRD. The result indicated： the gas sensor has extremely high sensitivity to NO2, but is insensitive to other gases.
出处
《陶瓷学报》
CAS
2008年第3期264-266,共3页
Journal of Ceramics
